| Schottky
Field emitter with high maximum beam current: |
>100 nA |
| Point resolution |
0.24 nm |
| Line resolution |
0.1 nm |
| Information
limit |
0.15 nm,
attainable <0.13 nm |
| TEM magnification |
25x -1030kx |
| S-TWIN objective
lens |
Maximum eucentric
tilt - ±400 |
| Selected
area diffraction camera length |
60-2400 mm |
| Maximum diffraction
half-angle |
±130 |
| Scanning
Transmission Mode (STEM): |
* Bright
Field and Annular Dark Field mode
* Ultra-high resolution STEM HAADF detector |
| STEM magnification |
100x - 10000kx |
| HR STEM
resolution |
0.2 nm |
| Micro-analysis
: |
* EDAX EDS
detector with 133 eV spectral resolution
* Small probes (<0.3 nm) |
| Embedded
Energy Filtered TEM (GATAN Imaging Filter 2001): |
* Embedded
Parallel Electron Energy Loss Spectroscopy and Energy Filter
(GATAN Multiscan
794 Phosphorus CCD + 622 TV system)
* Embedded EDS and EELS spectrum profiling and imaging |
| Specimen
stage: |
Fully computer-controlled,
eucentric side entry, high stability CompuStage |
| Specimen
holders: |
* CompuStage
low-background double-tilt holder
* CompuStage rotation holder
* CompuStage single tilt specimen holder |
| Recording
systems: |
* Embedded
CCD camera (GATAN Multiscan
794 YAG CCD + 692 TV system)
* Plate camera with 56 sheets of film |
| Vacuum: |
Oil free
vacuum system with turbo molecular pump, pre-pumping column,
gun and specimen airlock, fully interlocked differentially
pumped column |
Equipment and Techniques 
TEM - Overview