Unit for Nanocharacterization Equipment and Techniques SPM
Scanning Probe Microscope - Nanoscope Dimension 3100
SPM - Overview
SPM - Basics
SPM - Specifications
||16 bits (all
||Xand Y axis 100 micrometers; Z axis 7.5 micrometers
disk media: 150-mm diameter; 12 mm thick
150 mm vacuum chuck for wafers and other samples;
Magnetic holder for small samples up to 6 mm thick
Precise motorizes positioning;
125 mm x 100 mm inspected area; Resolution: 2 micrometer;
||Fluid cell and tip holder for working with liquid.
10 x objective, field of view of 180-810 micro meter;
motorized zoom and focus;
1.5 micrometer resolution;
video image capture
Silicone vibration pad;
Vibration isolation table
Brief description of the microscope and control electronics
The Nanoscope Dimension 3100 Scanning Probe Microscope (SPM) is
a low-noise system specifically designed to produce measurements
at the nanometer (lateral) and sub-angstrom (vertical) scales. An
Integrated Acoustic/Vibration Isolation System is used, which provides
true acoustic isolation for Dimension 3000 microscopes by enclosing
the vibration isolation platform within the acoustic hood and the
legs of the isolation table. This isolation system important for
users who are interested in imaging surfaces with roughness levels
of <10nm RMS, such as those encountered in the semiconductor,
data storage, and optics industries.
NanoScope V Controller is new atomic force/scanning probe microscopy control system, that has many enhansements over its predecessors, including several synchronization outputs, reference signal outputs for three lock-ins, and five analog inputs which can be sampled with Analog-to-Digital Converters (ADCs). The NanoScope V Controller provides more speed, more resolution, more sensitivity and more flexibility:
Highest Pixel Density: The resolution of the NanoScope V has been increased to 5k x 5k points per image. The high pixel density improves "time to results" by reducing the need to capture several images at lower resolution. It also allows observation of large structures and small features in the same image.
NanoScope V offers up to 10 times faster scanning with new TappingMode+TM technology (Fast scan). To achieve this, the NanoScope V employs micro-actuator probe technology, which uses its own feedback loop to move the probe in the Z-direction at speeds much faster than the scanner can by itself
Q control: improves sensitivity by either enhancing or suppressing a selectable narrow band within the tuning spectrum. Q enhancement can also improve the signal-to-noise ratio. This can then enable, for example, improved Phase contrast, as may be desirable for MFM imaging. Q control is also useful for damping and unwanted resonance in a multi-peaked spectrum.
Fast, Dependable Data Capture (HSDC): NanoScope V Controller utilizes advanced electronics, including A/D and D/A converters operating at 50 MHz, to deliver reliable, high-speed data capture. It allows researchers to record and analyze tip-sample interactions, such as at pull-off in force spectroscopy. HSDC is simultaneous with imaging or ramping and is independent of microscope mode.
The NanoScope V enables up to eight images to be simultaneously displayed in real-time and offline visualization/analysis, correlating information about unprecedented number of sample properties.
Three Lock-In Amplifiers: The controller incorporates two independent high-speed lock-ins (1 kHz - 5 MHz) and one mid speed lock-in (0.1 Hz - 50 kHz) allow sampling and determining amplitude and phase of up to three independent signals, or analyzing higher harmonics of a signal.
User-accessible hardware input/output: The controller also affords easy access to most input and output signals through front-panel BNCs. Input data into the controller from an external source is supported, as is user access to lock-in amplifiers and to signals to/from a microscope, e.g. XYZ sensors, amplitude, phase.
Thermal tune: the thermal tune method provides an automated and quick determination of cantilever spring constant. The Nanoscope V provides thermal tune measurements of cantilever resonances up to 2 MHz.
High speed and expanded AC capabilities:
The NanoScope V SPM controller has
. Two high speed 14-bit A/D converters (ADC) for sampling and digitizing the probe signal (+/-2V);
. Two high speed 16-bit ADCs that provide sinusoids (+/-10V);
. Nine mid-speed 18-bit ADCs enable multiple digital feedback loops to operate at 2 microseconds speed, allowing faster scanning and data capture with fast actuators.
Easy-AFM, Remarkable simplicity: For the ultimate in streamlined operational simplicity, the Nanoscope v controller's Easy-AFM, easy-of-use feature, offers an intuitive, easy-to-follow graphic user interface. Easy-AFM reduces the time for initial setup, including probe, laser, and detector alignments, adjusting the scanning parameters, and obtaining Tapping Mode images on most samples.
Open architecture provides new options to design and run customized experiments, including with third-party software.
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Hebrew University of Jerusalem