| Resolution: |
* 1.5 nm
at > 10 kV
* 2.5 nm at 1 kV |
| Accelerating
Voltage: |
200 V to
30 kV |
| Filament |
High stable
Schottky Field Emission Source |
| 5-axis motorized
eucentric stage: |
* x ,y =
50 mm
* Z = 25 mm (+25mm)
* Tilt -15 to +750 at 10 mm FWD
* rotation continuous |
| Detectors |
* Conventional
SE
* Through-the-lens Detector with changeable bias from -250 to +250 V for
detection of SE and BSE in UHR mode
* Solid State BSE with TV rate imaging and high sensitivity at low kV
* CCD camera for chamber observation |
| Operation
modes: |
* High
Resolution Mode for general survey and low magnification
viewing
* Ultra High Resolution Mode for high magnification and high resolution
viewing
* EDX Mode for EDX microanalysis and magnetic samples observation
|
| Vacuum system: |
Oil-free
vacuum |
| Microanalysis: |
* X-MAX20 SDD Inca 450 EDS LN2 free detector (Oxford Instruments, UK) with spectral resolution of 129 eV |
| Cathodoluminescence
spectroscopy set: |
* GATAN system
MonoCl3 for high resolution imaging (pan- and monochromatic)
and spectroscopy within extended spectral range (up to 1700
nm)
* GATAN helium cooled replacement
SEM stage (temperature range 5 - 300 K), 3-axis (manual) |
| Electron
beam induced current module: |
GATAN EBIC
system for non-destructive failure analysis of fine-scale semiconductor
electronic devices |
| Electron
back scattered diffraction module: |
TSL-EDAX stand-along
system for fast high resolution crystallographic acquisition
of bulk samples |
Equipment and Techniques 
SEM - Overview