Unit for Nanocharacterization Equipment and Techniques ESEM

Environmental Scanning Electron Microscope Quanta 200

ESEM - Overview
ESEM - Basics and Tutorials
ESEM - Specifications


Resolution: * 3.5 nm at 30 kV High vacuum mode
* 3.5 nm at 30 kV Low vacuum mode
* 3.5 nm at 30 kV ESEMTM mode
* 15 nm at 3 kV Low vacuum mode
Magnification: 7x - 1.000.000x High Vacuum Mode
7x - 1.000.000x Low Vacuum Mode
Accelerating Voltage: 200 V to 30 kV
Filament Tungsten Hairpin
4-axis motorized eucentric stage: x = y = 50 mm (motorized)
Z = 50 mm (25mm motorized)
Tilt -15 to +750
Tilt eucentric at analytical working distance of 10 mm
Image Processor: up to 3584 x 3094 pixelsFile type TIFF (8 or 16 bit), BMP or JPEG
System Control: 32 bit graphical user interface with Windows 2000
Detectors * 3rd generation, large-field gaseous SE detector with enhanced gain preamplifier suitable also for use at low voltages
* Standard Gaseous SE detector for operation up to 13 mbar (= 1300 Pa = 10 Torr)
* A CCD camera for chamber observation
* 2-segment solid-state backscattered detector optimized for low kV operation (down to 3 kV)
* 2-segment solid-state electron backscattered detector (Gaseous Analytical BSED) for microanalysis data collection in low vacuum mode
Microanalysis Fully embedded EDAX EDS detector (spectral resolution better than 132 eV)
In situ freeze-drying observation: Microprocessor controlled Peltier stage for cooling down to -200C
Features of the vacuum system include: * Patented through-the-lens (ESEMtm) differential pumping technology;
*250 l/s turbomolecular drag pump;
* 2 x 8 l/s rotary pumps;
* Seamless transition between the vacuum modes.

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