| Resolution: |
* 3.5 nm
at 30 kV High vacuum mode
* 3.5 nm at 30 kV Low vacuum mode
* 3.5 nm at 30 kV ESEMTM mode
* 15 nm at 3 kV Low vacuum mode |
| Magnification: |
7x - 1.000.000x
High Vacuum Mode
7x - 1.000.000x Low Vacuum Mode |
| Accelerating
Voltage: |
200 V to
30 kV |
| Filament |
Tungsten
Hairpin |
| 4-axis motorized
eucentric stage: |
x = y = 50
mm (motorized)
Z = 50 mm (25mm motorized)
Tilt -15 to +750
R=3600
Tilt eucentric at analytical working distance of 10 mm |
| Image Processor: |
up to 3584
x 3094 pixelsFile type TIFF (8 or 16 bit), BMP or JPEG |
| System Control: |
32 bit graphical
user interface with Windows 2000 |
| Detectors |
* 3rd generation,
large-field gaseous SE detector with enhanced gain preamplifier
suitable also for use at low voltages
* Standard Gaseous SE detector for operation up to 13 mbar (= 1300 Pa =
10 Torr)
* A CCD camera for chamber observation
* 2-segment solid-state backscattered detector optimized for low kV
operation (down to 3 kV)
* 2-segment solid-state electron backscattered detector (Gaseous Analytical
BSED) for microanalysis data collection in low vacuum mode |
| Microanalysis |
Fully embedded
EDAX EDS detector (spectral resolution better than 132 eV) |
| In situ freeze-drying
observation: |
Microprocessor
controlled Peltier stage for cooling down to -200C
 |
| Features
of the vacuum system include: |
* Patented
through-the-lens (ESEMtm) differential pumping technology;
*250 l/s turbomolecular drag pump;
* 2 x 8 l/s rotary pumps;
* Seamless transition between the vacuum modes. |
Equipment and Techniques 
ESEM - Overview